SSY-10000
Desktop loader system compatible with wafers such as glass, sapphire, SiC, GaN, etc.
A compact tabletop system that integrates the wafer inspection stage and the transport section. It features a long-stroke design with an X-axis of 190mm and a Y-axis of 200mm, allowing for wafer rotation operations at any position using a knob at hand. The transport robot has two chucks and can complete the wafer exchange operation to the inspection stage in a short time. The combination of the robot and the drop-in alignment stage achieves a low-cost, space-saving, and high-functionality system.
- Company：ジェーイーエル
- Price：Other
